IC Fabrication

UNIT – I

Chapter – 1

IC Fabrication

Syllabus

IC classification, fundamental of monolithic IC technology, epitaxial growth, masking and etching, diffusion of impurities. Realisation of monolithic ICs and packaging. Fabrication of diodes, capacitance, resistance, FETs and PV Cell.

Contents

1.1 Introduction ….. Dec.-16, …. Marks 15

1.2 Classification of Integrated Circuits ….. Dec.-10,16,17, …. Marks 15

1.3 Integrated Circuit Chip Size and Levels of Integration     

1.4 Fundamentals of Monolithic IC Technology           

1.5 Crystal Growth and Wafer Preparation …..  May-05,      ….. Marks 6

1.6 Epitaxial Growth …... May-05,07,08,11,13,15     

…..  Dec.-03,06,11,16,  …..  Marks 8

1.7 Oxidation …..  May-05, 06        …..  Marks 8

1.8 Photolithography …..   May-05,11,    

…..  Dec.-03,07,08,14,16, …..  Marks 13

1.9 Diffusion …... May-16, Dec.-06,09,11,         …..  Marks 8

1.10 Ion Implantation …..  May-16, Dec.-03,09, ….. Marks 8

1.11 Isolation Techniques …..  May-06, 07,14, Dec.-06,11, Marks 8

1.12 Metallization          …..  May-16, …..  Marks 10

1.13 Packaging of ICs …..  Dec.-10,17,May-15,16,      ….. Marks 10

1.14 Realization of Active and Passive Devices in Integrated Circuits      

…... May-04,06,07,08,10,12,14,15,16,18,

…... Dec.-03,05,07,08,09,11,12,14,16,17

1.15 Realization of Monolithic Integrated Circuit.

….. May-04,05,07,10,11,15,17,18

…..  Dec.-06,07,08,10,12,14,15,17 Marks 18

1.16 Fabrication of PV Cell             

1.17 Two Marks Questions with Answers          

1.18 University Questions with Answers (Long Answered Questions)